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Erwin Peiner
Erwin Peiner
Professor of Semiconductor Technology, TU Braunschweig University of Technology
Verified email at tu-bs.de - Homepage
Title
Cited by
Cited by
Year
Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever
HS Wasisto, S Merzsch, A Waag, E Uhde, T Salthammer, E Peiner
Sensors and Actuators B: Chemical 180, 77-89, 2013
1752013
Doping profile analysis in Si by electrochemical capacitance‐voltage measurements
E Peiner, A Schlachetzki, D Krüger
Journal of the Electrochemical Society 142 (2), 576, 1995
1701995
Piezoresistive cantilever as portable micro force calibration standard
I Behrens, L Doering, E Peiner
Journal of micromechanics and microengineering 13 (4), S171, 2003
1152003
Thermoelectric properties of high-doped silicon from room temperature to 900 K
A Stranz, J Kähler, A Waag, E Peiner
Journal of electronic materials 42, 2381-2387, 2013
982013
Sintering of copper particles for die attach
J Kahler, N Heuck, A Wagner, A Stranz, E Peiner, A Waag
IEEE Transactions on Components, Packaging and Manufacturing Technology 2 …, 2012
962012
Micro force sensor with piezoresistive amorphous carbon strain gauge
E Peiner, A Tibrewala, R Bandorf, S Biehl, H Lüthje, L Doering
Sensors and actuators A: Physical 130, 75-82, 2006
902006
GaN nanowire arrays with nonpolar sidewalls for vertically integrated field-effect transistors
F Yu, S Yao, F Römer, B Witzigmann, T Schimpke, M Strassburg, A Bakin, ...
Nanotechnology 28 (9), 095206, 2017
832017
Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection
HS Wasisto, S Merzsch, A Stranz, A Waag, E Uhde, T Salthammer, ...
Sensors and Actuators B: Chemical 189, 146-156, 2013
802013
Piezoresistive microcantilevers for humidity sensing
J Xu, M Bertke, HS Wasisto, E Peiner
Journal of Micromechanics and Microengineering 29 (5), 053003, 2019
782019
Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films
A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje
Applied surface science 252 (15), 5387-5390, 2006
772006
Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever
HS Wasisto, S Merzsch, E Uhde, A Waag, E Peiner
Microelectronic Engineering 145, 96-103, 2015
712015
Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures
Ü Sökmen, A Stranz, S Fündling, HH Wehmann, V Bandalo, A Bora, ...
Journal of Micromechanics and Microengineering 19 (10), 105005, 2009
702009
Form measurement inside fuel injector nozzle spray holes
E Peiner, M Balke, L Doering
Microelectronic Engineering 86 (4-6), 984-986, 2009
702009
Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing
J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ...
Sensors and Actuators B: Chemical 273, 276-287, 2018
692018
A micromachined vibration sensor based on the control of power transmitted between optical fibres
E Peiner, D Scholz, A Schlachetzki, P Hauptmann
Sensors and Actuators A: Physical 65 (1), 23-29, 1998
681998
Diamond-like carbon for MEMS
E Peiner, A Tibrewala, R Bandorf, H Lüthje, L Doering, W Limmer
Journal of micromechanics and microengineering 17 (7), S83, 2007
642007
Portable cantilever-based airborne nanoparticle detector
HS Wasisto, S Merzsch, A Waag, E Uhde, T Salthammer, E Peiner
Sensors and Actuators B: Chemical 187, 118-127, 2013
622013
Pick-and-place silver sintering die attach of small-area chips
J Kahler, N Heuck, A Stranz, A Waag, E Peiner
IEEE transactions on components, packaging and manufacturing technology 2 (2 …, 2011
602011
A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
HS Wasisto, Q Zhang, S Merzsch, A Waag, E Peiner
Microsystem technologies 20, 559-569, 2014
592014
Vertical GaN nanowires and nanoscale light-emitting-diode arrays for lighting and sensing applications
S Mariana, J Gülink, G Hamdana, F Yu, K Strempel, H Spende, ...
ACS Applied Nano Materials 2 (7), 4133-4142, 2019
542019
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