| Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications R Abdolvand, HM Lavasani, GK Ho, F Ayazi IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008 | 252 | 2008 |
| High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi Journal of Microelectromechanical Systems 12 (4), 487-496, 2003 | 246 | 2003 |
| Micromachined resonators: A review R Abdolvand, B Bahreyni, JEY Lee, F Nabki Micromachines 7 (9), 160, 2016 | 229 | 2016 |
| Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi Journal of microelectromechanical systems 17 (2), 512-520, 2008 | 228 | 2008 |
| An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon R Abdolvand, F Ayazi Sensors and Actuators A: Physical 144 (1), 109-116, 2008 | 186 | 2008 |
| In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators BP Harrington, R Abdolvand Journal of Micromechanics and Microengineering 21 (8), 085021, 2011 | 178 | 2011 |
| A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer BV Amini, R Abdolvand, F Ayazi IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006 | 170 | 2006 |
| Piezoelectric on semiconductor-on-insulator microelectromechanical resonators F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad US Patent 6,909,221, 2005 | 165 | 2005 |
| Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass R Abdolvand, BV Amini, F Ayazi Journal of microelectromechanical systems 16 (5), 1036-1043, 2007 | 161 | 2007 |
| Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators F Ayazi, GKF Ho, R Abdolvand US Patent 7,639,105, 2009 | 145 | 2009 |
| Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators G Piazza, R Abdolvand, GK Ho, F Ayazi Sensors and Actuators A: Physical 111 (1), 71-78, 2004 | 129 | 2004 |
| Quality factor in trench-refilled polysilicon beam resonators R Abdolvand, H Johari, GK Ho, A Erbil, F Ayazi Journal of Microelectromechanical Systems 15 (3), 471-478, 2006 | 108 | 2006 |
| Methods of forming oxide masks with submicron openings and microstructures formed thereby F Ayazi, R Abdolvand, SP Anaraki US Patent 7,056,757, 2006 | 103 | 2006 |
| High frequency micromechanical piezo-on-silicon block resonators S Humad, R Abdolvand, GK Ho, G Piazza, F Ayazi IEEE International Electron Devices Meeting 2003, 39.3. 1-39.3. 4, 2003 | 98 | 2003 |
| A 76 dB 1.7 GHz 0.18 m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi IEEE journal of solid-state circuits 46 (1), 224-235, 2010 | 95 | 2010 |
| Piezo-on-diamond resonators and resonator systems F Ayazi, R Abdolvand US Patent 7,812,692, 2010 | 84 | 2010 |
| Turnover temperature point in extensional-mode highly doped silicon microresonators M Shahmohammadi, BP Harrington, R Abdolvand IEEE transactions on electron devices 60 (3), 1213-1220, 2013 | 71 | 2013 |
| Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q BP Harrington, M Shahmohammadi, R Abdolvand 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 66 | 2010 |
| 7E-4 enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators R Abdolvand, F Ayazi 2007 IEEE Ultrasonics Symposium Proceedings, 608-611, 2007 | 62 | 2007 |
| High-order composite bulk acoustic resonators GK Ho, R Abdolvand, F Ayazi 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems …, 2007 | 58 | 2007 |
