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Michel Despont
Michel Despont
CSEM
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SU-8: a low-cost negative resist for MEMS
H Lorenz, M Despont, N Fahrni, N LaBianca, P Renaud, P Vettiger
Journal of Micromechanics and Microengineering 7 (3), 121, 1997
13911997
The" millipede"-nanotechnology entering data storage
P Vettiger, G Cross, M Despont, U Drechsler, U Durig, B Gotsmann, ...
IEEE Transactions on nanotechnology 1 (1), 39-55, 2002
10142002
The “Millipede”—More than thousand tips for future AFM storage
P Vettiger, M Despont, U Drechsler, U Durig, W Haberle, MI Lutwyche, ...
IBM Journal of Research and Development 44 (3), 323-340, 2000
8552000
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
H Lorenz, M Despont, N Fahrni, J Brugger, P Vettiger, P Renaud
Sensors and Actuators A: physical 64 (1), 33-39, 1998
7911998
A cantilever array-based artificial nose
MK Baller, HP Lang, J Fritz, C Gerber, JK Gimzewski, U Drechsler, ...
Ultramicroscopy 82 (1-4), 1-9, 2000
5182000
Nanoscale three-dimensional patterning of molecular resists by scanning probes
D Pires, JL Hedrick, A De Silva, J Frommer, B Gotsmann, H Wolf, ...
Science 328 (5979), 732-735, 2010
3792010
Ultrahigh-density atomic force microscopy data storage with erase capability
G Binnig, M Despont, U Drechsler, W Haeberle, M Lutwyche, P Vettiger, ...
Applied Physics Letters 74 (9), 1329-1331, 1999
3661999
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
HP Lang, R Berger, F Battiston, JP Ramseyer, E Meyer, C Andreoli, ...
Appl. Phys. A 66 (7), S61-S64, 1998
3271998
Millipede-a MEMS-based scanning-probe data-storage system
E Eleftheriou, T Antonakopoulos, GK Binnig, G Cherubini, M Despont, ...
IEEE transactions on magnetics 39 (2), 938-945, 2003
3222003
Ultralow nanoscale wear through atom-by-atom attrition in silicon-containing diamond-like carbon
H Bhaskaran, B Gotsmann, A Sebastian, U Drechsler, MA Lantz, ...
Nature nanotechnology 5 (3), 181-185, 2010
2632010
Atomic force microscope cantilevers for combined thermomechanical data writing and reading
WP King, TW Kenny, KE Goodson, G Cross, M Despont, U Dürig, ...
Applied Physics Letters 78 (9), 1300-1302, 2001
2492001
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
P Vettiger, J Brugger, M Despont, U Drechsler, U Dürig, W Häberle, ...
Microelectronic Engineering 46 (1-4), 11-17, 1999
2491999
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
M Despont, H Lorenz, N Fahrni, J Brugger, P Renaud, P Vettiger
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
2451997
Sequential position readout from arrays of micromechanical cantilever sensors
HP Lang, R Berger, C Andreoli, J Brugger, M Despont, P Vettiger, ...
Applied Physics Letters 72 (3), 383-385, 1998
2341998
VLSI-NEMS chip for parallel AFM data storage
M Despont, J Brugger, U Drechsler, U Dürig, W Häberle, M Lutwyche, ...
Sensors and Actuators A: Physical 80 (2), 100-107, 2000
2242000
Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist
H Lorenz, M Despont, P Vettiger, P Renaud
Microsystem Technologies 4, 143-146, 1998
2131998
Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
L Dellmann, S Roth, C Beuret, GA Racine, H Lorenz, M Despont, ...
Sensors and Actuators A: Physical 70 (1-2), 42-47, 1998
1931998
Selective transfer technology for microdevice distribution
R Guerre, U Drechsler, D Jubin, M Despont
Journal of Microelectromechanical Systems 17 (1), 157-165, 2008
1912008
Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
WP King, TW Kenny, KE Goodson, GLW Cross, M Despont, UT Durig, ...
Journal of Microelectromechanical Systems 11 (6), 765-774, 2002
1772002
Higher modes of vibration increase mass sensitivity in nanomechanical microcantilevers
MK Ghatkesar, V Barwich, T Braun, JP Ramseyer, C Gerber, M Hegner, ...
Nanotechnology 18 (44), 445502, 2007
1712007
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